The MEMS HandbookMohamed Gad-el-Hak CRC Press, 27/09/2001 - 1368 من الصفحات The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide market approaching billions of dollars. In time, microdevices will fill the niches of our lives as pervasively as electronics do right now. But if these miniature devices are to fulfill their mammoth potential, today's engineers need a thorough grounding in the underlying physics, modeling techniques, fabrication methods, and materials of MEMS. The MEMS Handbook delivers all of this and more. Its team of authors-unsurpassed in their experience and standing in the scientific community- explore various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations. Designed for maximum readability without compromising rigor, it provides a current and essential overview of this fledgling discipline. |
المحتوى
Lubrication in MEMS Kenneth S Breuer | 3-9 |
BubbleDrop Transport in Microchannels HsuehChia Chang 111 | 3-11 |
Fundamentals of Control Theory Bill Goodwine 121 | 3-12 |
Introduction Mohamed GadelHak | 4-1 |
and Robert H Stroud | 6-2 |
Physics of Thin Liquid Films Alexander Oron 101 | 9-10 |
BubbleDrop Transport in Microchannels HsuehChia Chang 111 | 10-11 |
Applications of MEMS | 12-1 |
Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide | 21-5 |
Beheim 211 | 22-21 |
Microfabricated Chemical Sensors for Aerospace Applications | 22-23 |
Gary W Hunter ChungChiun Liu and Darby B Makel 221 | 23-22 |
Inertial Sensors Paul L Bergstrom and Gary G Li 241 | 23-25 |
and Mohamed GadelHak 261 | 23-26 |
SurfaceMicromachined Mechanisms Andrew D Oliver and David W Plummer 271 | 27-1 |
Packaging of HarshEnvironment MEMS Devices LiangYu Chen and JihFen Lei 231 | 27-23 |
ModelBased Flow Control for Distributed Architectures Thomas R Bewley 131 | 13-1 |
ModelBased Flow Control for Distributed Architectures Thomas R Bewley 131 | 13-13 |
Soft Computing in Control Mihir Sen and Bill Goodwine 141 | 13-14 |
Design and Fabrication | 14-36 |
Materials for Microelectromechanical Systems Christian A Zorman and Mehran Mehregany 151 | 14-39 |
Coupling Flow | 15-5 |
Burnett Simulations of Flows in Microdevices Ramesh K Agarwal | 18-7 |
Lubrication in MEMS Kenneth S Breuer | 19-9 |
MEMS Fabrication Marc J Madou 161 | 19-16 |
LIGA and Other Replication Techniques Marc J Madou 171 | 19-17 |
XRayBased Fabrication Todd Christenson 181 | 19-18 |
Electrochemical Fabrication EFABT Adam L Cohen 191 | 19-19 |
Fabrication and Characterization of SingleCrystal Silicon Carbide MEMS Robert S Okojie 201 | 20-31 |
Microrobotics Thorbjörn Ebefors and Göran Stemme 281 | 27-28 |
Microscale Vacuum Pumps E Phillip Muntz and Stephen E Varg 291 | 27-29 |
Microdroplet Generators FanGang Tseng 301 | 27-30 |
Micro Heat Pipes and Micro Heat Spreaders G P Bud Peterson 311 | 27-31 |
Microchannel Heat Sinks Yitshak Zohar 321 | 27-32 |
MolecularBased Microfluidic Simulation Models Ali Beskok | 28-8 |
Flow Control Mohamed GadelHak 331 | 33-1 |
The Future | 33-41 |
Reactive Control for SkinFriction Reduction Haecheon Choi 341 | 33-53 |
Towards MEMS Autonomous Control of FreeShear Flows Ahmed Naguib 351 | 35-35 |
Fabrication Technologies for Nanoelectromechanical Systems Gary H Bernstein Holly V Goodson and Gregory L Snider 361 | 36-19 |
| 36-25 | |
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عبارات ومصطلحات مألوفة
algorithm anisotropic applications beam Beskok Boltzmann Boltzmann equation boundary conditions bulk micromachining Burnett equations capillary channel circuit coefficient components compressive computational continuum density deposition developed devices doped DSMC dynamics effects Electrochem electrodeposition electrokinetic electronic energy etch rate etchants fabrication flow fluid force function fuzzy geometry gradient heat IEEE interface Knudsen number layer LIGA linear liquid lithography LPCVD Madou mask measured Mechanical Properties membrane MEMS metal method Micro microchannel microdevices Microelectromechanical Microelectromechanical Systems Microfabrication microfluidic Microstructures mold molecular molecules Navier-Stokes equations nitride nonlinear oxide parameters photoresist Phys planes plate PMMA poly-Si polyimide polysilicon potential pressure ratio resist Reynolds number sacrificial scale Sensors and Actuators shear shown in Figure silicon silicon nitride simulation SiO2 Solid-State Sensors solution specimen structures substrate surface micromachining techniques temperature tensile thermal thickness Thin Films typical velocity viscosity wafer X-ray X-ray lithography Young's modulus